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Microfabrication Facility at CAOUS
Overview
The Integrated Microfabrication Facility provides state-of-the art equipment in clean room conditions for the preparation
of samples, the deposition of dielectric and metal films and analysis of surface morphology and texture. Under the
coordinating management of the Swinburne Optics and Laser Laboratories (SOLL), in the Faculty of Engineering and Industrial
Sciences, the Facility offers knowledge, service, equipment and space in microfabrication areas of engineering and applied
science for both the research and teaching communities within the University, external research institutions and local
industries. The Facility was established at SOLL in 2003 through a Systemic Infrastructure Initiative grant from the
Department of Education, Science and Training (DEST) and a Swinburne University Strategic Initiative grant.
The Facility
is located in Room AS120 (Applied Science Building, Hawthorn campus) and occupies roughly 30 m2 area. Major equipment
includes a Kurt J. Lesker CMS-18 HV thin film deposition system, a Solver P7LS scanning probe microscope, a BX51
optical microscope with Kerr microscope accessory and CCD imaging capability, a Terra Universal desiccator with
nitrogen purge and a laminar flow workstation.
Key Capabilities
• Clean room conditions with anteroom, HEPA filter clean airflow, sticky mats and foot covers are used inside the Facility.
• CMS-18 HV thin film deposition system (Kurt J. Lesker)
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The Kurt J. Lesker CMS-18 thin film deposition system with a base pressure of 5.0×10-8 Torr capable of
magnetron sputtering (three magnetron guns) and electron beam evaporation (four evaporation sources) provides preparation
of various high-quality thin films, such as Al, Au, Ag, Co, Cr, Cu, Fe, Gd, Ni, Tb, Ti, FeCo, GdTbFeCo, SmCo, SiO2, TiO
and Y2O3 for nanotechnology, biotechnology, atom optics, surface sciences, nano materials and micro devices. A residual
gas analyzer unit is available.
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| Thin film deposition system |
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• Solver P7LS scanning probe microscope (NT-MDT)
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The NT-MDT Solver P7LS scanning probe microscope, mounted on a Newport vibration isolation workstation, provides coverage
of SPM techniques of atomic force microscopy and magnetic force microscopy to image the surface morphology and
magnetic microstructure, and to quantitatively measure and analyze the surface roughness of various surfaces
on a nanometer scale.
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| Scanning probe microscope |
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Activities
• Preparation and characterisation of nano magnetic thin films for atom optics
• Consulting work involving the preparation and characterisation techniques of various thin films,
metals, and bio-materials |
Research team
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Prof. Peter Hannaford
Prof. Andrei Sidorov
Dr. James Wang
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Contact |
For accessing the Facility please contact:
Dr. James Wang
Phone: 9214 8657
Mobile: 0430 920 585
Email: jawang@groupwise.swin.edu.au |
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