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Microfabrication Facility at CAOUS


The Integrated Microfabrication Facility provides state-of-the art equipment in clean room conditions for the preparation of samples, the deposition of dielectric and metal films and analysis of surface morphology and texture. Under the coordinating management of the Swinburne Optics and Laser Laboratories (SOLL), in the Faculty of Engineering and Industrial Sciences, the Facility offers knowledge, service, equipment and space in microfabrication areas of engineering and applied science for both the research and teaching communities within the University, external research institutions and local industries. The Facility was established at SOLL in 2003 through a Systemic Infrastructure Initiative grant from the Department of Education, Science and Training (DEST) and a Swinburne University Strategic Initiative grant.

The Facility is located in Room AS120 (Applied Science Building, Hawthorn campus) and occupies roughly 30 m2 area. Major equipment includes a Kurt J. Lesker CMS-18 HV thin film deposition system, a Solver P7LS scanning probe microscope, a BX51 optical microscope with Kerr microscope accessory and CCD imaging capability, a Terra Universal desiccator with nitrogen purge and a laminar flow workstation.

Key Capabilities

 • Clean room conditions with anteroom, HEPA filter clean airflow, sticky mats and foot covers are used inside the Facility.

 • CMS-18 HV thin film deposition system (Kurt J. Lesker)

The Kurt J. Lesker CMS-18 thin film deposition system with a base pressure of 5.0×10-8 Torr capable of magnetron sputtering (three magnetron guns) and electron beam evaporation (four evaporation sources) provides preparation of various high-quality thin films, such as Al, Au, Ag, Co, Cr, Cu, Fe, Gd, Ni, Tb, Ti, FeCo, GdTbFeCo, SmCo, SiO2, TiO and Y2O3 for nanotechnology, biotechnology, atom optics, surface sciences, nano materials and micro devices. A residual gas analyzer unit is available.

thin film dep system
Thin film deposition system
 • Solver P7LS scanning probe microscope (NT-MDT)
The NT-MDT Solver P7LS scanning probe microscope, mounted on a Newport vibration isolation workstation, provides coverage of SPM techniques of atomic force microscopy and magnetic force microscopy to image the surface morphology and magnetic microstructure, and to quantitatively measure and analyze the surface roughness of various surfaces on a nanometer scale.

Scanning probe microscope

 • Preparation and characterisation of nano magnetic thin films for atom optics
 • Consulting work involving the preparation and characterisation techniques of various thin films, metals, and bio-materials

Research team

Prof. Peter Hannaford
Prof. Andrei Sidorov
Dr. James Wang

For accessing the Facility please contact:
Dr. James Wang
Phone: 9214 8657
Mobile: 0430 920 585