Microfabrication Facility

The facility offers knowledge, service, equipment and space in microfabrication areas of engineering and applied science for the research and teaching communities within Swinburne, external research institutions and local industries.

The Microfabrication Facility at Swinburne Optics and Laser Laboratories (SOLL) provides state-of-the-art equipment in clean room conditions for the preparation of samples, the deposition of dielectric and metal films, and the analysis of surface morphology and texture. 

Located at Swinburne's Hawthorn campus, the facility occupies an area of approximately 30 square metres. Activity centres on the preparation and characterisation of nano magnetic thin films for atom optics, and consulting work involving the preparation and characterisation techniques of various thin films, metals, and bio-materials. 

The microfabrication facility is equipped with the following major equipment:

  • Kurt J. Lesker CMS-18 HV thin film deposition system
  • Hysitron TI Premier Nanoindenter
  • Solver P7LS scanning probe microscope
  • BX51 optical microscope with Kerr microscope accessory and CCD imaging capability
  • Terra Universal desiccator with nitrogen purge
  • laminar flow workstation.

Established through a Systemic Infrastructure Initiative grant from the Department of Education, Science and Training (DEST) and a Swinburne University Strategic Initiative grant, the facility is under the coordinated management of SOLL, Faculty of Science, Engineering and Technology.


For facility access, please contact:

Dr James Wang
Phone: +61 3 9214 8657
Email: jawang@swin.edu.au