Micro Technology
Research Activities:
Excimer Laser Micromachining Technology
Microsensors
Micro Optics
UV Material Modification
MEMS, MST, MOEMS and Microengineering
A/Prof Erol Harvey received his Ph.D in Physics from Monash
University in 1988. He moved to the UK where he became Operations
Manager of the SPRITE laser facility of the SERC Rutherford
Appleton Laboratory near Oxford. In 1991 he moved to Exitech
Limited, a spin-out company from the Rutherford Laser Facility,
where he was Principal Development Engineer and Head of System
Design and Fabrication of the Advanced Excimer Laser Micromachining
systems. In this role he has been the project co-ordinator for
Workstation Design and fabrication for customers throughout
Japan, Europe, Asia and the Far East, and has worked closely
with customers around the world developing applications
Manufacturing
Technologies
CRC
for Manufacturing Technologies
Typical Publication and
Patents:
- E C Harvey, T R mackin, R E Scholten "Micro
optical structures for atom lithography" SPIE
Vol 3892, 28 Oct 1999, pp
- M Ghantasala, E Harvey and D Sood "Excimer
laser micromachining of structures using SU-8",
SPIE Vol 3874, 20 Sep 1999, pp85-91
- N.H.Rizvi, E.C. Harvey, P.T. Rumsby, J.P.H. Burt,
M.S. Talary, J.A. Tame and R. Pethig, "An Excimer
Laser Micromachining System for the production of
Bioparticle Electromanipulation Devices" SPIE
Vol 3224, 29 Sept 1997, pp266 - 272
- P.T. Rumsby, N.H. Rizvi, E.C. Harvey and D. Thomas "Excimer
laser patterning of thick and thin films for high-density
packaging", in "Microelectronic Packaging
and Laser Processing" SPIE Vol 3184, 25 June
1997, pp 176 - 185
- E.C. Harvey and P.T. Rumsby "Fabrication techniques
and their application to produce novel micromachined
structures and devices using excimer laser projection" in "Micromachining
and microfabrication process technology III" SPIE
Vol 3223, 25 June 1997, pp26 - 33
- P.T. Rumsby, E.C. Harvey and D.W. Thomas "Laser
Microprojection for Micromechanical Device Fabrication" SPIE
Vol 2921, 4 Dec 1996, pp684 – 692
- Erol C Harvey, Phil T Rumsby, Malcolm C Gower and
Jason L Remnant "Microstructuring by Excimer
Laser" SPIE Vol 2639, 23 Oct 1995, pp266 – 276
- Erol C Harvey, Phil T Rumsby and Malcolm C Gower "Excimer
laser projector for materials processing applications",
Proc. Laser Advanced Materials Processing LAMP92,
High Temperature Soc. Japan, 1992, pp1047-1052
- E C Harvey, C J Hooker, M H Key, A K Kidd, M D
Lister, M J Shaw and W T Leyland "Picosecond
gain and saturation measurments in a KrF laser amplifier
depumped by amplified spontaneous emission:, J.Appl.Phys,
70(10), 1991, pp5238-5245
- J M D Lister, M J Shaw, C J Hooker and E C Harvey "Uniform
target illumination by spatial incoherence in a multiplexed
KrF laser system", Optics.Comm,84(1,2), 1991,
pp55-60
- I N Ross, M J Shaw, C J Hooker, M H Key, E C Harvey,
J M D Lister, J E Andrew, G J Hurst and P A Rogers "A
high performance excimer pumped Raman Laser" Opt.Comm,
78(3,4), 1990, pp263-270
- E C Harvey and M J Shaw "A simple kinetic model
for electron beam-pumped KrF lasers", Laser&Part.
Beams, Feb2 1990
- E C Harvey, P T Rumsby, T Wheelwright, Coinventors
Patent Application "Laser engraving of integlio printing
plates for bank notes and security printing" (Europe,
20 Feb 1996)
- R C Tobin, E C Harvey, A K Anders Coinventors Patent "Room
temperature metal vapour laser:, USA 4771435, Sept
13, 1998
- R C Tobin, E C Harvey, A K Anders, Coinventors
Patent "Room temperature metal vapoyr laser" Australia
65352/86, Europe 87100909.8
Typical Research Projects:
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