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Nano Lab

The Centre for Micro-Photonics has a class 1000 clean room with a suite of new lithography tools capable of THREE dimensional (3D) and traditional two dimensional (2D) structuring, device fabrication and materials processing.

Laboratory Overview

Lab Leader:
Senior Technician:
The Nano lab is located at the Swinburne University Hawthorn Campus, Advanced Technoligies Centre (ATC) building's basement.
Usage Rates:

CMP student wins MCN image of the year

Gediminas Seniutinas of CMP has been selected as the winner of the MCN Image of the Year, 2012 competition for his image "Nano-Winter".

This image shows gold coating on "black silicon" nano needles. Structures of this type have interesting optical and sensing applications.

Congratulations to Gediminas Seniutinas on this achievement.

* The length of scale bar is 1 micrometer. See news article here.

For information regarding this project contact

Nano-Fast Fabrication - Time Allocation Awarded

Congratulations to the following projects awarded "Nano-fast fabrication" time:

1. Dr. Hoang Vu Le "sample for coherent diffractive imaging using XUV source" (10 h awarded)
2. Dr. Christopher Hall, "Optic-free spectral measurement of XUV/soft X-ray light sources" (10 h awarded)
3. Prof. Peter Hannaford "New Generation Periodic Lattices for Ultracold Quantum gases" (5 h awarded)
4. Ms. Shouyi Xie "Transparent conductive metal nanowire networks" (5 h awarded)
5. Mr. Salmaan Rashid Syed "Excitation and propagation of Surface Plasmon Polariton" (5 h awarded)

These exciting projects will commence in 2013.

Further possibilities and inquires can be explored now and is open to all industry and University projects. Inquires to Saulius Juodkazis

Nano- Fast Fabrication - Project call

The best nano-/micro-fabrication projects will be carried out free of charge for Swinburne applicants for upto a cumulative 10 hours access time to set of all available equipment listed below.

Obtain application and instructions here.

Sent the application slide to

Applications will be reviewed by the selection committee.

Nano-lab with set of 10 nm resolution equipment (opened on Feb. 1, 2012 in ATC cleanroom) have finished installation with all major units available for your projects:

1. EBL - Raith 150two electron beam lithography (can be used as SEM)
2. IBL - Raith IonLiNE ion beam lithography (Ga+ focused ion beam)
3. Sputter-Coater - JKLesker AXXIS e-beam evaporation and plasma sputtering (metals; dielectrics)
4. Dry-Etcher - Inductively Coupled Plasma etching Samco RIE-101iPH
5. Mask aligner - AOI (1-2 micron resolution)

Sample prep-lab for resist coating and development is in the cleanroom.

Regular pricing and user access fees can be found here.
Discounts are available to Swinburne user access fees (conditions apply).

Access and user training: Dr. Xijun LiĀ - Email:

Top 10 download in OpEx - Swinburne Nano Lab - in October 2012

(Solar Cells and Sensing) Disorder induced light enhancement

Optics Express, Vol. 20, Issue 10, pp. 11466-11477 (2012)

(IR sensing)

Y. Nishijima, H. Nigorinuma, L. Rosa, and S. Juodkazis Selective enhancement of infrared absorption with metal hole arrays Optical Materials Express, Vol. 2, Issue 10, pp. 1367-1377 (2012)

Other papers relevant to Nano-lab capabilities:


S. Juodkazis, Y. Nishi, H. Misawa, V. Mizeikis, O. Schecker, R. Waitz, P. Leiderer, E. Scheer Optical transmission and laser structuring of silicon membranes Optics Express, Vol. 17 Issue 17, pp.15308-15317 (2009)

(Photonic crystals)

S. Juodkazis, L. Rosa, S. Bauerdick, L. Peto, R. El-Ganainy, and S. John Sculpturing of photonic crystals by ion beam lithography: towards complete photonic bandgap at visible wavelengths Optics Express, Vol. 19, Issue 7, pp. 5802-5810 (2011)

(THz-IR antenas)

Sierpinski fractal plasmonic nanoantennas L. Rosa, K. Sun and S. Juodkazis Phys. Status Solidi RRL 5 (5-6), 175-177 (2011)

Major Instalations

1. EBL-defined pattern, (Raith 150two system)
2. Au-sputtered, (JKLesker Axxis system)
3. IBL-inscribed, (Raith IonLiNE system)
4. Plasma dry etching, (Samco RIE-101iPH)

Collaboration with MCN, Black-Si, available.

Posibilities: Zoo of ideas

Three Dimensional fabrication

Fabrication of nanoparticles
Cutting through membrane
Chiral patterns for opto-mechanics
Photonic crystals
Micro-fluidic channels of complex 3D geometry


Research Projects and Affiliations:

Investigation of mechanisms of the femtosecond laser induced photo-polymerization in resins and resists. Comparison of two-photon absorption and avalanche rates in photo-polymerization of micro-optical elements and photonic crystal structures and templates. Future work will extend to the use of electron beam lithography for the fabrication of nano structures.

More Information
Investigation of enhancement and localization of the light field component of various geometries and material combinations due to the plasmonic effects in nanoparticles. These types of light field enhancements are important for the electron transport through the interface in solar cells and photo-catalytic applications and investigation will lead to better understanding and development of efficient solar cells.
More Information

Lab Leader:
Saulius Juodkazis

ph: +61 3 9214 8718

Lab Technician:
Xijun Li

ph: +61 3 9214 5296


Research Projects: