TY - JOUR SN - 2041-1723 AU - Gan, Zongsong AU - Cao, Yaoyu AU - Evans, Richard A. AU - Gu, Min T1 - Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size T2 - Nature Communications VL - 4 PY - 2013 L1 - 10.1038/ncomms3061 JA - Nat Comms TS - CrossRef DO - 10.1038/ncomms3061 ER -